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MEMS Structures

MEMS Digital Tuning Structures

At the heart of WiSpry’s product innovations is our high performance Tunable Digital Capacitor technology based on common MEMS structural elements. WiSpry’s process and design library methodology have laid the foundation for a range of innovative and highly integrated RF devices using our core MEMS technology.

The Digital Capacitor concept takes these advantages to the next level. WiSpry’s design permits the creation of high density, switched capacitor arrays, which deliver a very precise range of capacitor values, in turn enabling a very wide tuning range (20:1, at die level- on average}. Complementing this innovation is our high performance RF interconnect and RF transmission line design that ensures an extremely high Q, and low loss design.

Features of WiSpry’s tunable RF technology include:
  • Separate Signal and Control Path
    - High isolation delivers excellent RF performance (increased sensitivity)
    - No Coupling of Control Signal into RF Path
  • Patented Beam Structure Improves Isolation & Reliability
    - Eliminates "charging" effect, improving reliability, minimize
  • Precise High-Ratio Digital Capacitors
    - Wide range of values available through dielectric choice
    - Similar device structure size ensures high yield
These innovations form the core components of WiSpry’s evolving range of tunable RF front-end products for high performance mobile devices.

WiSpry: we make wireless work. . . better!